Photogrammetry is uniquely qualified to provide means to quantify the
surface characteristic of thin film shells as it is non-contactive. In its
pursuit of improved shell figure, Mevicon Inc. personnel have developed
many specialized techniques and approaches to realize high precision
photogrammetry. Average measurement dynamic range of 200,000:1 (2.5
micron rms error to best fit surface over 0.5 m diameter object size)
versus an independently Zeiss CMM calibrated test object has been
demonstrated. Back to back repeatability is better than 1 micron rms.
Spatial sampling frequencies of 10 to 20 mm (point to point on square)
are typically used.